Guide Electromechanical Sensors and Actuators

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Physics Classical Continuum Physics. Mechanical Engineering Series Free Preview. Buy eBook. Buy Hardcover. Buy Softcover. FAQ Policy. About this Textbook Mechanical engineering, an engineering discipline borne of the needs of the industrial revolution, is once again asked to do its substantial share in the call for industrial renewal. Show all. Show next xx. Read this book on SpringerLink cover old. Thus this concept of nano electromechanical systems has been proven.

The strong electromechanical response of the investigated nanotube can be understood in terms of a strain dependent bandgap opening, which consequently leads within the ther- mal activated transport model to an exponential increase of the resistance R as a function of applied strain. Note that a and b origin from different devices [68A].

Membrane-based carbon nanotube electromechanical transducers Complementary to the suspended CNT electromechani- cal transducers, which are discussed in previous section, a membrane-based CNT transducer has been demonstrated [14]. As an advantage of the membrane-based test stands the local deformation of the tube at the edges of the cantilevers or bridges is avoided and axial stress is applied to the tube by straining the membrane.

This device is a SWNT-based pressure sensor, utilizing the tube as electromechanical piezoresistive transducer Figs. The SWNTs are adhered to the membrane sur- based nanoscaled sensor system; b SEM image of a fabricated functional face by van der Waals forces and are electrically connected building block before the final HF release cantilever [68]. The investigated individual single-walled carbon nanotube is contacted by two 30 nm thick gold electrodes 1 nm Ti for adhesion , which are separated by approx. Additionally, a side gate has been patterned to tune the investigated nanotube.

Please, note that this measurement origins from a different device as shown in Fig. Thus, the first pressure sensor transfer function of a metallic SWNT pressure sensor has been demonstrated. The review and results presented in this paper confirm the potential and excellent performance of SWNTs for sensors by the integration of tubes in well-defined MEMS structures to reproducibly quantify electromechanical device properties, e. Further investigations are necessary to evaluate noise properties and to investigate the influence of the fabrica- tion process on these properties.

The direct integration of CNTs into devices will result in the next generation of nanotransducers for mechanical loads. To develop these NEMS it is mandatory to continue research on the control and the reproducibility of the assembly, or even better the growth of CNTs. Self-assembly or self-assembled growth of nanostructures instead of structur- ing by photolithographic means will be the preferred process Fig.

We thank Prof. Victor Bright and Prof. Steven George, suring the I—U transfer characteristics of the tube for each applied both University of Colorado at Boulder, for many helpful dis- differential pressure Fig. Support of the nanotransducers research program ment points. The error bars shown in Fig. Zhang, Y. Huang, P. Geubelle, P. Klein, K. Hwang, The elastic modulus of single-wall carbon nanotubes: a continuum analysis incorpo- [1] C.

Hierold, C. Stampfer, T. Helbling, A. Jungen, M.

Tripp, D. Sarangi, rating interatomic potentials, Int. Solids Struct. Williams, S. Papadakis, A. Patel, M.


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    Electromechanical Sensors and Actuators Dr. Qing-Ming Wang Professor of Mechanical ...

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